Crystal LabFerrara · UniFe & INFN
X-ray diffractometer and infrared wafer metrology system

Instruments you can work with.

Our cleanroom and metrology labs in Ferrara. Every instrument here is open to joint projects and measurements with universities, research institutes and companies: write to us with what you need.

Cut and shape

Dicing saw for 150 mm wafersDisco DAD3220Diamond-blade dicing of wafers and crystals up to 150 mm.

Pattern and coat

Mask alignerSUSS MicroTec MA6UV photolithography with top-side and back-side alignment. Robotic 3D photolithographyMaskless photolithography on curved and non-planar surfaces.

Bond

Wafer bonderSUSS SB8 Gen2Anodic and thermo-compression bonding of wafers and crystals. Four-axis dispensing robotNordson EFD PROPlusProgrammed dispensing of adhesives and resins, with confocal height control.

Measure

Fizeau laser interferometerZygo Verifire HDXForm and flatness of optics and crystals, resolved to a fraction of a nanometre. Optical profilerZygo NexView NX2Non-contact 3D topography and roughness of surfaces. High-resolution X-ray diffractometersMalvern Panalytical X'Pert³ MRD XLCrystal orientation, miscut and curvature, to the microradian. Infrared wafer metrologyFOGALE nanotech T‑Map Dual IR 300MThickness maps of wafers by infrared interferometry.

Build and house

3D printerFixtures, holders and detector mechanics printed in-house. CleanroomThe controlled environment where every crystal is made.

Looking for an instrument that is not here? Write to crystals@fe.infn.it: our partners at the Department of Physics and Earth Sciences and at INFN Ferrara may have it.