Robotic 3D photolithography

What it does

Photolithography usually needs a flat wafer and a mask. Here a collaborative robot carries a UV projector over the part and exposes the resist one field at a time, with no mask. The robot keeps the projector at the right distance and angle, so the pattern lands where it should on curved and non-planar surfaces too.

The pattern is a digital image: changing a design takes minutes instead of a new mask, and the same tool exposes flat test pieces and three-dimensional parts.

The robot also carries a precision peristaltic pump. It lays down measured amounts of silicate solution along a programmed path, the first step of glue-free bonding of curved optics.

What we use it for

• Contacts on non-planar germanium

  3D photolithography of metal films on germanium crystals with non-planar surfaces, for γ-ray detectors in the INFN N3G project.

• Curved X-ray optics

  Silicate dispensing for bonding the curved optics of X-ray telescopes, with INAF Brera.

• Quick prototypes

  Tests of new patterns without waiting for a mask.

Working with us

If your part is curved, or your pattern changes too often to make masks, we can test the exposure on a sample with you.